Method for manufacturing semiconductor device, epitaxial substrate for use therein and semi-finished semiconductor device

摘要

A method for manufacturing a semiconductor device includes: (a) providing a base unit made of a material having a first lattice constant; (b) forming a first sacrificial layer made of a material having a second lattice constant on the base unit and a second sacrificial layer made of a material having a third lattice constant on the first sacrificial layer, the first lattice constant ranging between the second and third lattice constants so that two lattice stresses in opposite directions occur in the epitaxial substrate; (c) forming an epitaxial unit on the second sacrificial layer; (d) forming a permanent substrate on the epitaxial unit; and (e) removing the epitaxial unit.

主权项

1. A method for manufacturing a semiconductor device, comprising:
(a) providing a base unit made of a material having a first lattice constant; (b) forming a first sacrificial layer made of a material having a second lattice constant on the base unit and forming a second sacrificial layer made of a material having a third lattice constant on the first sacrificial layer, the first and second sacrificial layers cooperatively defining a sacrificial unit, the base unit and the sacrificial unit cooperatively defining an epitaxial substrate, the first lattice constant ranging between said second and third lattice constants so that two lattice stresses in opposite directions occur in the epitaxial substrate; (c) forming an epitaxial unit of a semiconductor material on the second sacrificial layer opposite to the base unit; (d) forming a permanent substrate on the epitaxial unit; and (e) removing the epitaxial unit from the epitaxial substrate by etching the sacrificial unit so as to obtain a semiconductor device containing the permanent substrate and the epitaxial unit.