High temperature-low leakage probe apparatus and method of manufacturing same

摘要

In one embodiment, the present invention includes an apparatus for contacting a plurality of contact locations of a semiconductor device. The apparatus includes a housing, a support member, a plurality of probe members, and an adhesive substance. The housing has a plurality of apertures that provides a low leakage pathway for high frequency signals to reach the semiconductor device through the plurality of probe members. The plurality of probe members are aligned on the support member and the adhesive substance secures the plurality of probe members to the supporting member. The housing, supporting member, and adhesive substance match in thermal expansion to reduce the error in alignment between the plurality of contact locations and the plurality of probe members over a temperature variance.

主权项

1. A probe apparatus for contacting a plurality of contact locations of a semiconductor device, said probe apparatus comprising:
a housing having a plurality of apertures; a support member protruding below a lower surface of said housing and attached to said housing; a plurality of probe members aligned on said support member to contact said plurality of contact locations; and an adhesive substance securing said plurality of probe members to said supporting member, wherein said housing, said supporting member, and said adhesive substance match in thermal expansion to reduce an error in alignment between said plurality of contact locations and said plurality of probe members over a temperature variance, and wherein said plurality of apertures provide a low leakage pathway for electrical coupling to said semiconductor device via said plurality of probe members; and further comprising a plurality of micro-coaxial segments, wherein each micro-coaxial segment passes through a corresponding aperture of the plurality of apertures, wherein each micro-coaxial segment includes a first portion of center conductor exposed below said lower surface of said housing, and wherein said first portion of each micro-coaxial segment is coupled to a corresponding probe member of the plurality of probe members.