发明名称 |
Vacuum pump |
摘要 |
A vacuum pump comprises a molecular drag pumping mechanism and a regenerative pumping mechanism. A rotor element of the molecular drag pumping mechanism surrounds rotor elements of the regenerative pumping mechanism. |
申请公布号 |
US8851865(B2) |
申请公布日期 |
2014.10.07 |
申请号 |
US200410572894 |
申请日期 |
2004.09.23 |
申请人 |
Edwards Limited |
发明人 |
Stones Ian David;Schofield Nigel Paul;Stuart Martin Nicholas |
分类号 |
F04D19/04;F04D19/02;H01J49/24;F04D23/00;F04D17/16 |
主分类号 |
F04D19/04 |
代理机构 |
Westman, Champlin & Koehler, P.A. |
代理人 |
Westman, Champlin & Koehler, P.A. |
主权项 |
1. A vacuum pump comprising a molecular drag pumping mechanism and, downstream therefrom, a regenerative pumping mechanism, wherein a rotor element of the molecular drag pumping mechanism surrounds rotor elements of the regenerative pumping mechanism,
wherein the rotor element of the molecular drag pumping mechanism comprises a cylinder mounted for rotary movement with the rotor elements of the regenerative pumping mechanism. |
地址 |
Crawley, West Sussex GB |