Substrate processing apparatus and substrate conveying apparatus for use in the same

摘要

A substrate processing apparatus includes a substrate processing section that processes a plurality of substrates assuming a vertical posture in a batch manner; a first traversing mechanism that laterally moves a first traverse holding portion along a first traversing path between a substrate transfer position and a substrate delivery position; a second traversing mechanism that laterally moves a second traverse holding portion along a second traversing path disposed below the first traversing path between the substrate transfer position and the substrate delivery position; an elevation mechanism that raises and lowers an elevation holding portion in the substrate transfer position; and a main transfer mechanism that conveys a plurality of substrates assuming a vertical posture in a batch manner between the substrate delivery position and the substrate processing section, the first and second traverse holding portions, and the elevation holding portion each holds a plurality of substrates assuming a vertical posture in a batch manner.

主权项

1. A substrate processing apparatus defining therein a horizontal and a vertical direction, comprising:
a substrate processing section that processes a plurality of substrates assuming a vertical posture in a batch manner; a first traversing mechanism that horizontally moves a first traverse holding portion along a first traversing path between a substrate transfer position and a substrate delivery position, the first traversing path having a first end disposed vertically above the substrate transfer position and a second end disposed vertically above the substrate delivery position in plan view, the first traverse holding portion holding a plurality of substrates assuming a vertical posture in a batch manner; a second traversing mechanism that horizontally moves a second traverse holding portion along a second traversing path disposed vertically below the first traversing path, thereby overlapping the first traversing path in the vertical direction between the substrate transfer position and the substrate delivery position, the second traversing path having a third end disposed vertically above the substrate transfer position and a fourth end disposed vertically above on the substrate delivery position, the second traversing path entirely overlapping the first traversing path in the vertical direction between the third end and the fourth end, the second traverse holding portion holding a plurality of substrates assuming a vertical posture in a batch manner; an elevation mechanism that raises and lowers an elevation holding portion in the substrate transfer position, the elevation holding portion holding a plurality of substrates assuming a vertical posture in a batch manner; and a main transfer mechanism that conveys a plurality of substrates assuming a vertical posture in a batch manner between the substrate delivery position and the substrate processing section.