Vacuum device and bonding apparatus using the same

摘要

A vacuum device includes a main body and an adjustment assembly connected to the main body. The main body includes a frame, a loading member, and an elastic film. The loading member and the elastic film are arranged at opposite end surfaces of the frame. A chamber is cooperatively formed by the frame, the loading member, and the elastic film. The adjustment assembly adjusts the inner air pressure of the chamber. The loading member includes an absorption area connecting the chamber to outside the main body. The absorption area changes the air pressure inside the chamber. Also provided is a bonding apparatus using the vacuum device.

主权项

1. A vacuum device, comprising:
a main body comprising:
a frame having a first end surface, a second end surface opposite to the first end surface and four side surfaces between the first and second end surfaces, the frame defining an opening thereon cutting through the first end surface and the second end surface;a loading member fixed on the first end surface of the frame and covering an end of the opening of the frame, the loading member comprising a screen with fluid sealant coated on parts thereof, parts of the screen not coated in the fluid sealant forming an absorption area, andan elastic film fixed on the second end surface of the frame and positioned opposite to the loading member; the elastic film covering an another end of the opening of the frame opposite to the loading member, such that, the elastic film, the frame and the loading member cooperatively defining a chamber, the elastic film being pressed to contact the loading member, thereby bonding a protective film with a substrate arranged on the loading member; two adjustment assemblies oppositely connected to two sides of the frame of the main body for adjusting air pressure inside the chamber, and two regulating members oppositely assembled to the other two sides of the main body for changing the air pressure inside the chamber; wherein the loading member defines an absorption area communicating the chamber and the exterior of the main body, the absorption area faces outside of the chamber.