Display device provided with MEMS light valve and forming method thereof

摘要

A display device provided with an MEMS light valve, comprising: a substrate, a fixed optical grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed optical grating, the MEMS light valve comprises a first light valve and a second light valve; the opening and closing of the fixed optical grating is controlled via controlling the movement of the first light valve and the second light valve, and the moving directions of the first light valve and the second light valve are opposite. Also disclosed is a method for forming a display device provided with an MEMS light valve. Thus the sensitivity of the MEMS light valve is improved.

主权项

1. A display device with a micro-electromechanical system (MEMS) light valve, comprising:
a substrate; and a fixed optical grating and a MEMS light valve above the substrate, wherein the MEMS light valve is used to control the fixed optical grating to open or close; wherein the MEMS light valve comprises a first light valve and a second light valve, the first light valve is formed on the second light valve, the fixed optical grating is configured to be opened or closed by controlling movements of the first light valve and the second light valve, and movement directions of the first light valve and the second light valve are opposite; wherein the first light value comprises a first movable optical grating, a first electrode and, a second electrode; wherein the first movable optical grating is fixed to and electrically coupled with the first electrode which is disposed correspondingly with the second electrode, a capacitor is formed between the first electrode and the second electrode, and when an electric potential difference exists between the first electrode and the second electrode, the first electrode is configured to drive the first movable optical grating to move; and wherein a fixed end is provided on a side of the first movable optical grating which is opposite to the first electrode, the first movable optical grating is fixed to the fixed end, and when there is no electric potential difference existing between the first electrode and the second electrode, the fixed end is configured to drive the first movable optical grating to return to an original position.