LASER ANNEALING APPARATUS, METHOD FOR LASER ANNEALING, AND DISPLAY APPARATUS MANUFACTURE BY USING THE METHOD

摘要

The present invention provides a laser annealing apparatus which reduces time needed for laser annealing and has a simple configuration, a laser annealing method, and a display apparatus manufactured by using the method. The laser annealing apparatus comprises: a mounting unit for mounting a substrate; first and second driving modules installed on the mounting unit and adjusting locations of first and second mark masks to be placed on a part of the substrate; first and second image modules that may obtain image data regarding the first and second mark masks to be location-adjusted by the first and second driving modules; and a laser module which radiates a laser beam to the substrate and changes at least a part of an amorphous silicon layer of the substrate to crystalline silicon.