| 摘要 |
<p>The present invention relates to a process for cleaning polycrystalline silicon chunks in an acidic cleaning bath, wherein the cleaning comprises several cleaning cycles, wherein a particular amount of acid is consumed in each cleaning cycle, wherein an integrator of a computer-controlled dosage system is used to add up those amounts of acid consumed in each cleaning cycle to give a current total consumption of acid in the cleaning bath, wherein, on attainment of a total consumption of acid in the cleaning bath which corresponds to an optimal dosage of the dosage system, the dosage system supplies this optimal dosage of unconsumed acid withdrawn from a reservoir vessel to the cleaning bath. The invention also relates to a process for cleaning polycrystalline silicon chunks in an acidic cleaning bath comprising an acid circuit in which acid is circulated, wherein the ratio of amount of acid circulated in liters to the mass of polysilicon chunks present in the cleaning bath in kg is greater than 10.</p> |
