| 摘要 |
The present invention relates to a defect inspection apparatus which includes a camera; a first lighting unit; a second lighting unit; and a retroreflection unit. The camera takes a picture of a defect of an inspected subject. The first lighting unit is installed at the camera and irradiates the inspected subject by light in a direction same with that of an optic axis of the camera. The second lighting unit includes a first lighting heat irradiating the inspected subject by light and having a plurality of light sources arranged in a line to be spaced apart; and a second lighting heat parallel to the first lighting heat and having a plurality of light sources arranged in a line to be spaced apart. The retroreflection unit is arranged between the first lighting heat and the second lighting heat and retroreflects the light irradiated by the first lighting unit to the camera. Optic axes of the light sources of the first lighting heat and optic axes of the light sources of the second lighting heat are arranged to be inclined with respect to the light source arrangement direction in which the light sources are arranged in the line and to be crossing each other. The optic axes of the light sources of the first lighting heat are arranged to be inclined toward the second lighting heat, and the optic axes of the light sources of the second lighting heat are arranged to be inclined toward the first lighting heat. |
