X-RAY FLUORESCENCE ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide an X-ray fluorescence analyzer capable of restraining fluctuations of output intensity by a relatively simple configuration and control.SOLUTION: An X-ray fluorescence analyzer 1 comprises: an X-ray source 2 for radiating primary X-rays to a sample S; a light-gathering element 3 for gathering the primary X-rays radiated from the X-ray source 2 and reducing an area for irradiating the sample; a detector 4 for detecting fluorescent X-rays generated from the sample irradiated with the primary X-ray; and a housing 5 for accommodating the X-ray source 2 and the light-gathering element 3. The X-ray fluorescence analyzer 1 further comprises: a temperature sensor 6 mounted on at least one of the X-ray source 2 and the periphery of the X-ray source 2; at least one outside air fan 7 provided on the housing 5, and capable of changing inside air with outside air; and a control section C for driving the outside air fan 7 on the basis of temperature information detected by the temperature sensor 6 and adjusting atmospheric temperature around the X-ray source 2 to be a constant temperature.