| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology capable of satisfactorily performing exfoliation and satisfactorily conveying in an adhesion body which is formed by adhering plate bodies, in an exfoliation device for exfoliating and separating the two plate bodies which are adhered with each other.SOLUTION: A lifter pin 361 is projected on a top face of a planar stage 30, and a work WK carried in from the outside is received. The lifter pin 361 is abutted to a bottom face of a blanket BL in an abutment-enabled region TR outside of an effective region AR where a substrate SB and the blanket BL are overlapped and an effective pattern is formed, in the work WK where the substrate SB and the blanket BL are adhered via a pattern. By supporting the region where the substrate SB and the blanket BL are overlapped, warpage of the work WK is suppressed and stress is prevented from being concentrated to the pattern within the effective region AR. |
