| 摘要 |
PROBLEM TO BE SOLVED: To provide a valve capable of simplifying and miniaturizing a structure of a piezoelectric element driving type metal diaphragm control vale, and facilitate assembly, maintenance and check of the structure.SOLUTION: A flow control valve comprises: a valve body 1; a metal diaphragm valve body 2; a presser screw 5; an upper support cylinder body 23 mounted vertically in a hole part 1a for a valve chamber of the valve body 1 and screwed with a lower support body 22 having a diaphragm presser 3 at a lower part; a guide body 24 mounted to an outer periphery of the upper support body 23; a leaf spring 18 arranged on a bottom wall of the lower support body 22 via a leaf spring receiving board 8; a lower receiving board 9 provided in an upper support cylinder body 21; a piezoelectric element 10 mounted in the upper support cylinder body 21 via a ball 9a; a bearing 14 arranged at an upper part of the piezoelectric element 10; and positioning members 12, 13 arranged above the upper support cylinder body 23. |
