| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection apparatus that prevents decrease in accuracy in inspecting an inspection target object due to thermal displacement generated in the X-ray inspection apparatus, and a method for inspecting an inspection target object using the X-ray inspection apparatus.SOLUTION: An X-ray inspection apparatus comprises: a distance sensor 6 that is positioned on a main body 17, 31 of the X-ray inspection apparatus 1, and can measure first distances L1, L5 that are a distance between a radiation section 4 and a detection section 5 and second distances L2, L6 that are a distance between the radiation section or the detection section and an inspection target object 7 conveyed by a conveyance mechanism 3; and calculation means that calculates an amount A of change of the first distance by comparing the first distance L1 at a first time with the first distance L5 at a second time after the lapse of a predetermined period from the first time, calculates an amount B of change of the second distance by comparing the second distance L2 at the first time with the second distance L6 at the second time, and calculates a correction value Z2 for correcting thermal displacement of the main body and thermal displacement of the conveyance mechanism on the basis of the amount of change of the first distance and the amount of change of the second distance. |
