| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve a wavelength selection characteristic (sensitivity).SOLUTION: The electromagnetic wave detector detecting an electromagnetic wave (300) of a specific wavelength comprises: a substrate (308) that has a reading circuit (307) formed inside; a temperature detection part (301) that is arranged to be spaced apart from the substrate (308), and includes a bolometer thin film; a support part (302) that includes electrode wiring connected to the reading circuit (307) and the bolometer thin film, and supports the temperature detection part (301) in a state where the temperature detection part is floated from the substrate (308); and an electromagnetic wave resonance structure (400; 402 and 404) that is provided on the substrate (308) and at the temperature detection part (301). The electromagnetic wave resonance structure (400; 402 and 404) resonates the electromagnetic wave (300) of the specific wavelength in an advancing direction of the electromagnetic wave and in a vertical direction orthogonal to the advancing direction, converts the electromagnetic wave (300) of the specific wavelength to heat and transmits the converted heat to the temperature detection part (301).</p> |
