发明名称 POSITIVE PHOTOSENSITIVE RESIN COMPOSITION, METHOD OF PRODUCING CURED PATTERN USING THE SAME, RELIEF PATTERN OBTAINED THEREBY, AND LIGHT EMITTER HAVING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a positive photosensitive resin composition which exhibits excellent adhesion to a substrate, does not cause resist burning or carbonization even in heat treatment at 100°C-300°C, and provides a cured film allowing easy removal with a resist stripping solution.SOLUTION: A positive photosensitive resin composition comprises: a polyamic acid or polyamic acid ester comprising a structural unit represented by the general formula (1) as a main component; a naphthoquinonediazide compound; and a silane compound represented by the general formula (2), where r is an integer 2 or 3.
申请公布号 JP2014191002(A) 申请公布日期 2014.10.06
申请号 JP20130063415 申请日期 2013.03.26
申请人 TORAY IND INC 发明人 KAMOGAWA MASAO;SUWA MITSUFUMI;HIBINO TOSHIYASU
分类号 G03F7/075;C08G73/10;G03F7/023 主分类号 G03F7/075
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