发明名称 |
POSITIVE PHOTOSENSITIVE RESIN COMPOSITION, METHOD OF PRODUCING CURED PATTERN USING THE SAME, RELIEF PATTERN OBTAINED THEREBY, AND LIGHT EMITTER HAVING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a positive photosensitive resin composition which exhibits excellent adhesion to a substrate, does not cause resist burning or carbonization even in heat treatment at 100°C-300°C, and provides a cured film allowing easy removal with a resist stripping solution.SOLUTION: A positive photosensitive resin composition comprises: a polyamic acid or polyamic acid ester comprising a structural unit represented by the general formula (1) as a main component; a naphthoquinonediazide compound; and a silane compound represented by the general formula (2), where r is an integer 2 or 3. |
申请公布号 |
JP2014191002(A) |
申请公布日期 |
2014.10.06 |
申请号 |
JP20130063415 |
申请日期 |
2013.03.26 |
申请人 |
TORAY IND INC |
发明人 |
KAMOGAWA MASAO;SUWA MITSUFUMI;HIBINO TOSHIYASU |
分类号 |
G03F7/075;C08G73/10;G03F7/023 |
主分类号 |
G03F7/075 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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