PATTERN INSPECTION SYSTEM, AND PATTERN INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a pattern inspection system or the like for enabling appearance inspection with high accuracy without being affected by a disturbance.SOLUTION: The pattern inspection system performs appearance inspection of an inspection object obtained by forming a wiring part 11 having linear parts arranged in a pattern arrangement direction at intervals on a base material 13. The pattern inspection system includes a photographing device for photographing the inspection object, and an image processing device for binarizing an image 10 obtained by photographing the inspection object, contracting an area of black pixels including the linear parts of the wiring part 11 after expanding the area, and erasing the linear parts of the wiring part 11 to leave a defective part 15 behind.