发明名称 HEAT TREATMENT DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To apply heat treatment to a large number of treated products in a short time.SOLUTION: A heat treatment device comprises a heating part, a conveying mechanism, and an elevation part. The conveying mechanism has: first to third supporting parts; and first to third conveying parts sequentially arranged in one direction along an upper face of the heating part, and conveying the first and second treated products above the heating part in the other direction along the upper face of the heating part vertical to one direction. The first conveying part supports one end of the first treated product, the second conveying part supports the other end of the first treated product and one end of the second treated product, and the third conveying part supports the other end of the second treated product. The elevation part moves upward and downward between a position above the upper face of the heating part and a position below the upper face of the heating part. Each conveying part includes plural rotors aligned in the other direction and rotating around an axis in one direction as a center. Each rotor of the second conveying part has width larger than its diameter. The first and third supporting parts support and move the rotors of the first and third conveying parts. The second supporting part rotatably supports each rotor of the second conveying part, with an axis crossing with the upper face of the heating part as a center.</p>
申请公布号 JP2014189875(A) 申请公布日期 2014.10.06
申请号 JP20130068643 申请日期 2013.03.28
申请人 KYOCERA CORP 发明人 MATSUSHIMA NORIHIKO;INOMATA YOSUKE;ISHIKAWA SHINYA;YOKOTA HIROKO;KISHU ATSUO
分类号 C23C16/54;H01L21/677 主分类号 C23C16/54
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