| 摘要 |
PROBLEM TO BE SOLVED: To provide a microphone that allows achieving a reduction in height while protecting a diaphragm from external environment.SOLUTION: A microphone 1 comprises: a plate substrate 10 having a main surface 10a; an acoustic sensor mounted on the main surface 10a; and a circuit element 30 processing a signal outputted from the acoustic sensor. The acoustic sensor includes a sensor substrate 20. The sensor substrate 20 has a first surface 20b facing the plate substrate 10, and a second surface 20a on the opposite side of the first surface 20b. In the sensor substrate 20, a hollow portion 28 penetrating from the first surface 20b to the second surface 20a is formed. In the plate substrate 10, a through hole 18 penetrating in the thickness direction of the plate substrate 10 and communicating with the hollow portion 28 is formed. When viewed in the thickness direction of the plate substrate 10, the through hole 18 is overlapped with the sensor substrate 20. |
