| 摘要 |
PROBLEM TO BE SOLVED: To reduce the size of a feed-through or a vacuum device.SOLUTION: A vacuum feed-through comprises: a body for composing part of a partition separating a vacuum side and an atmosphere side, and having a plurality of conductive pins extending through the body in the thickness direction thereof; an insulation part, which is a contact member arranged on the vacuum side face of the body, formed from an insulating member, and having the shape of a flat plate; a contact member having a plurality of conductive parts formed so as to extend through the insulation part in the thickness direction and so as to project from at least one of the two faces of the insulation part, which face is opposite the body, composed of pressurized conductive rubber, and provided to come into contact with the pins; and a pressing member provided to press the contact member to the body side. The pressing member is configured such that the contact member can be pressed to the body side while a flexible printed board electrically connected to the electronic component of a vacuum device is sandwiched between the pressing member and the contact member. |
