| 摘要 |
The present invention provides a display substrate supporting device which comprises: a plate for supporting a substrate; and a plurality of adhesive chucks for providing adhesiveness to attach the substrate. The adhesive chuck includes a base portion secured to the plate; a through-hole provided so that a lift pin which performs a dechucking role by being provided in the base portion can pass through; and adhesive protrusions arranged around the through-hole in multiple columns spaced apart from the center of the through-hole at different distances. Adhesiveness of the adhesive chucks are reduced toward the center from the outside of the plate. |
