| 摘要 |
A substrate holding unit of the present invention includes a susceptor installed to support a center region of the rear surface of a substrate; and a frame provided around the susceptor to support an edge region of the rear surface of the substrate and a stepped portion which is formed to the outside of the substrate on one surface supporting the edge of the rear surface of the substrate and has the height higher than one surface of which the edge of the rear surface is supported. According to embodiments of the present invention, since the edge of the rear surface of the substrate is supported by the frame, the whole front surface of the substrate is not shielded, but is exposed, thereby forming a thin film on the whole front surface of the substrate. Therefore, the edge region of the front surface of the substrate does not become a dead zone and the thin film can be formed on the whole front surface of the substrate, thereby utilizing the whole front surface of the substrate. It is possible to form display cells on the whole front surface of the substrate, thereby improving a process yield and the efficiency, relative to the conventional apparatus, when producing a flat display of a large area. |
