发明名称 |
NITRIDE POLYCRYSTAL OF GROUP 13 METAL IN PERIODIC TABLE, AND PRODUCTION METHOD OF NITRIDE SINGLE CRYSTAL OF GROUP 13 METAL IN PERIODIC TABLE BY USING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a production method of a nitride single crystal capable of heightening raw material utilization efficiency by improving a growth rate, and producing efficiently a nitride crystal having excellent conductivity without contamination of an unnecessary impurities, in production of the nitride single crystal by an ammonothermal method.SOLUTION: A nitride polycrystal of a group 13 metal in the periodic table in which the average pore diameter in a pore volume standard is 8 μm or more and 50 μm or less, and further the pore volume is 0.1×10ml/g or more and 0.1 ml/g or less is filled into a reaction vessel as a raw material, and a nitride single crystal of the group 13 metal in the periodic table is grown in the presence of a solvent in the supercritical and/or subcritical state in the reaction vessel. |
申请公布号 |
JP2014189426(A) |
申请公布日期 |
2014.10.06 |
申请号 |
JP20130064734 |
申请日期 |
2013.03.26 |
申请人 |
MITSUBISHI CHEMICALS CORP |
发明人 |
KUBOTA KOHEI;SAITO TAKEYA;NAGAOKA HIROFUMI |
分类号 |
C30B29/38;C30B7/10 |
主分类号 |
C30B29/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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