| 摘要 |
PROBLEM TO BE SOLVED: To improve long-term reliability of a sample holding tool.SOLUTION: A sample holding tool 1 is made of ceramic, has a sample holding surface 10a on the external surface, and includes a substrate 10 having a passage 11 in the inside thereof and a coating film 30 covering the internal surface of the passage 11. The coating film 30 has an intrusion part 31 which extends from the inner surface to the substrate 10 and intrudes thereinto. Even if vibration is generated by fluid pulsation or the like due to having the intrusion part 31, this vibration can be excellently dispersed. |
