| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a luminance value distribution of high precision from an image of low resolution.SOLUTION: A reference straight line is set so as to cross an edge of a pattern. On an imaging object, there appear a flat part of constant luminance, and an inclination part where luminance changes as comes away from the flat part. The resolution of an image is low, and a range on the imaging object corresponding to one pixel is a size in which the flat part and the inclination part are contained on both sides of a border part when the border part between the flat part and the inclination part runs a center of the range. On the reference straight line, a plurality of reference positions are spaced at a pixel pitch. From luminance values at a plurality of reference positions, a reference position positioned at an end of the flat part and a reference position which adjoins the inclination part side from the reference position are identified. From coordinates X-Xof the reference positions and luminance values V-V, an unknown number is obtained from a model function 812 in which a constant function is combined with a primary function. Thus, the model function 812 is obtained which represents luminance value distribution on the reference straight line.</p> |
