TRANSFER PEELING DEVICE, TRANSFER PEELING METHOD, AND PASTERN FORMATION SYSTEM

摘要

PROBLEM TO BE SOLVED: To stably transfer a pattern formed in one among both one surfaces to the other with high productivity, by peeling both, after closely contacting one surface of a blanket with one surface of a plate-like object.SOLUTION: A transfer peeling method comprises a process of transferring the pattern formed in the one among the one surface of a blanket BL and the one surface of a plate-like object PP(SB) to the other by mutually pressing and closely contacting the one surface of the blanket BL held by a first stage 211 positioned in a transfer position P1 and the one surface of the plate-like object PP(SB) held by a second stage 241, a process of positioning by moving the first stage 211 to a peeling position P12 from the transfer position P1 still in a state of closely contacting the plate-like object PP(SB) with the blanket BL by holding the blanket BL by the first stage 211 and a process of peeling the plate-like object PP(SB) from the blanket BL held by the first stage 211 positioned in the peeling position P12.