| 摘要 |
The present invention provides a display substrate supporting device that includes: a plate which supports a substrate; and a plurality of adhesive chucks which are arranged on the plate and provides adhesive force to allow the substrate to be attached to the plate. The adhesive chucks includes a base part which is fixed on the plate; a through-hole which is arranged on the base part and allows a lift pin, which performs a dechucking process, to pass therethrough; and adhesive protrusions which are arranged around the through-hole in multiple rows to be separated from the center of the through-hole at each different distance. |
