| 摘要 |
PROBLEM TO BE SOLVED: To prevent vibration or the like of a foil even when resonance occurs, and to prevent debris deposited to foils from being stagnated in a foil trap.SOLUTION: In a portion in contact with sides of foils 4a in a length direction at an edge of a rotary foil trap 4, annular outside rings 6A and 6B are mounted for mutually fixing the foils 4a with each other. The outside rings 6A and 6B are provided outside of a range of convergence (angle of convergence) by an EUV converging mirror, and a plane direction of the outside rings 6A and 6B is set to be substantially vertical to a rotation axis of the foil trap 4. Thus, vibrations or the like of the plurality of foils 4a caused by resonance that occurs when a rotation speed to incur resonance is reached, can be prevented, and since the plane direction of the outside rings 6A and 6B is set to be substantially vertical to the rotation axis of the foil trap 4, debris deposited to the foils 4a is prevented from being stagnated in the foil trap 4. |
