| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a temperature controller capable of highly accurately and easily setting a threshold value corresponding to a state where proper temperature control is not performed.SOLUTION: The temperature controller controls temperature of heated bodies 10, 20 by a heater 5. Temperature detection units 10, 20 detect the temperature of the heated bodies 10, 20. A difference calculation unit 6 calculates a difference value between a temperature detection value and a temperature setting value. Adjustment units 61, 62 calculate a manipulated variable to make the difference value zero. A comparison unit 72 compares the difference value acquired by the difference calculation unit 6 with a predetermined threshold value, and when the difference value is over the threshold value, outputs a first signal. An abnormality detection unit 73 outputs a second signal being an abnormality detection signal, when the first signal is outputted for a time exceeding a predetermined setting time. When the second signal is outputted, a power supply stop unit 64 stops power supply to the heater 5 to which the amount of power supply is controlled on the basis of the manipulated variable acquired by the adjustment units 61, 62.</p> |
