| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve mixing efficiency, and to suppress mixing of unnecessary fluid components even immediately after switching of fluid components to be mixed, in a valve for mixing a plurality of kinds of fluids.SOLUTION: A manifold valve 11 includes: an inlet-side main flow channel 13 branched into a plurality of branch flow channels 19; an outlet-side main flow channel 15 where a plurality of joining channels join; and a plurality of valve portions disposed between the inlet-side main flow channel 13 and the outlet-side main flow channel 15. Each of the plurality of valve portions has a valve chest 25 provided with a branch flow channel communicating port communicating with at least one of the plurality of branch flow channels 19, a joining flow channel communicating port communicating with at least one of the plurality of joining flow channels 21, and a sub-fluid flow channel communicating port communicating with a sub-fluid flow channel 31, a valve element 27 for opening and closing the sub fluid flow channel communicating port, and a driving portion 29 for driving the valve element 27.</p> |
