RADIATION SENSITIVE RESIN COMPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a radiation sensitive resin composition having high sensitivity and high resolution which provides a spacer having excellent balance between compression strength and restoration force and an interlayer insulating film having excellent transparency, light resistance and voltage holding ratio.SOLUTION: There is provided a radiation sensitive resin composition which comprises: [A] a polymer having (A1) a structural unit having a carboxyl group, (A2) a structural unit having at least one selected from the group consisting of an oxiranyl group and an oxetanyl group and (A3) a specific siloxane based structural unit; [B] a polymerizable unsaturated compound; [C] a radiation-sensitive polymerization initiator; and [D] a siloxane compound having a specific polymerizable unsaturated bond.