| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel plasma waveguide system with excellent economic and technical efficiency.SOLUTION: A step with a height decreasing at a predetermined angle is formed in a waveguide, and a block part with a predetermined height is provided at an inner side surface of the waveguide opposite to a step part of the waveguide. Thereby, a problem with external leakage of microwaves involved in a 3-stub system penetrating through an overall waveguide and a problem with damage to an external system due to microwaves traveling outward may be effectively solved. Further, the block part of the predetermined height provided at the inner side surface of the waveguide is located at an opposite surface to the step part. |
