| 摘要 |
PROBLEM TO BE SOLVED: To reduce processing unevenness due to difference of processing positions when a workpiece is processed by scanning laser beam.SOLUTION: Positions of an adjustment lens 151 and a condenser lens 153 in an optical axis direction are fixed. A movable lens 152 is movable in the optical axis direction in a predetermined movable range between the adjustment lens 151 and the condenser lens 153. The adjustment lens 151 collects laser beam, and the longer a main face distance d12, the smaller a diameter of the laser beam injecting to the movable lens 152 becomes. The movable lens 152 widens the laser beam, and the longer a main face distance d23, the larger the diameter of the laser beam injecting to the movable lens 152 becomes. The condenser lens 153 collects the laser beam on a processed face of a workpiece, the laser beam is scanned by a galvano-mirror. The invention can be applied to a laser marker, for example. |
