SEMICONDUCTOR DEVICE TEMPERATURE CONTROLLER

摘要

PROBLEM TO BE SOLVED: To control a temperature of a semiconductor device as a test object accurately.SOLUTION: A semiconductor device temperature controller (10A) which controls a heat source (20A) to set a desired temperature of a semiconductor device formed on a semiconductor wafer (30) as a test object comprises: a probe (11) configured to be able to contact a temperature measurement device (31) formed on the semiconductor wafer; an electric characteristics measurement unit (12) measuring the electric characteristics of the temperature measurement device via the probe with the semiconductor wafer being heated by the heat source or being cooled; a heat source control unit (16A) receiving a measurement result obtained by the electric characteristics measurement unit and a target value, and controlling the heat source so as to cause the measurement result obtained by the electric characteristics measurement unit to coincide with the target value. The target value is determined based on a measurement result of the electric characteristics of a temperature measurement device (31') formed on a reference semiconductor wafer (30') placed in a thermostat bath (40) whose temperature is maintained in a desired temperature.