发明名称 CAPTEUR DE PRESSION POUR FLUIDE
摘要 <p>A fluid pressure measurement sensor (11) comprises a microelectromechanical system (MEMS) chip (23). The MEMS chip (23) comprises two lateral walls (56), a sensitive membrane (49) connected to said lateral walls (56) and sealed cavity (9). The exterior surfaces of the lateral walls (56) and the sensitive membrane (49) are exposed to the fluid pressure. The lateral walls (56) are designed to subject the sensitive membrane (49) to a compression stress transmitted by the opposite lateral walls (56) where said lateral walls (56) are connected to the sensitive membrane (49) such that the sensitive membrane (49) works in compression only. The MEMS chip (23) also comprises a stress detection circuit (31) to measure the compression state of the sensitive membrane (49) which is proportional to the fluid pressure.</p>
申请公布号 FR2983955(B1) 申请公布日期 2014.10.03
申请号 FR20110061376 申请日期 2011.12.09
申请人 OPENFIELD 发明人 DONZIER ERIC;TAVERNIER EMMANUEL
分类号 G01L7/08;G01L9/06 主分类号 G01L7/08
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