X-RAY FLUORESCENCE ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide an X-ray fluorescence analyzer capable of detecting a foreign substance placed on a fall prevention plate.SOLUTION: An X-ray fluorescence analyzer 1 comprises: a sample table 2 that has an opening 2a at an X-ray radiation position and where a sample S can be placed on the opening; an X-ray source 3 that radiates primary X-rays X1 to the sample placed on the opening from below; and a detector 4 that is disposed below the opening and detects fluorescent X-rays X2 generated from the sample irradiated with the primary X-rays. The X-ray fluorescence analyzer 1 further comprises: a transparent fall prevention plate 5 that is supported immediately below the opening in a manner capable of advancing and retracting; a drive mechanism 6 that advances and retracts the fall prevention plate; an observation camera 7 that is disposed below the opening so as to observe the fall prevention plate when the plate is positioned immediately below the opening; and a computing section 8 that processes an image of the fall prevention plate obtained by the observation camera. The computing section detects a foreign substance S1 on the fall prevention plate on the basis of difference between the images before and after the drive mechanism moves or vibrates the fall prevention plate within an observation range of the observation camera.