| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a foreign substance inspection apparatus and a foreign substance inspection method capable of correctly detecting a foreign substance existing in an object to be inspected and the amount of the foreign substance, and determining the quality of the object to be inspected with high accuracy.SOLUTION: A foreign substance inspection apparatus 100a comprises a sample table 3, an illumination section 1a, and a detection section 2 for detecting light from the illumination section 1a. The detection section 2 is disposed at such a position as to be capable of detecting light 11b scattered in scattering directions A, B on a straight line differing from a direction in which light 11a from the illumination section 1a travels. The detection section 2 adjusts focus by relatively moving with respect to the sample table 3 in a direction along the scattering directions so as to detect the existence of an imaged foreign substance 12 and the position of the foreign substance 12.</p> |
