| 发明名称 |
PLASMA WAVGUIDE USING STEP PART AND BLOCK PART |
| 摘要 |
In a magnetron and a plasma waveguide through which a microwave oscillated from the magnetron moves, there is provided a plasma waveguide including a plurality of step parts formed at any one side on an inner side surface of the waveguide, and a block part of a predetermined height formed at any other side on the inner side surface of the waveguide, wherein the block part is formed at a side opposite to a boundary part between the plurality of step parts. |
| 申请公布号 |
US2014292195(A1) |
申请公布日期 |
2014.10.02 |
| 申请号 |
US201414225693 |
申请日期 |
2014.03.26 |
| 申请人 |
TRIPLE CORES KOREA CO., LTD. |
发明人 |
Kim Ik Nyun;Kang Sung Ok;Eum Min Heum |
| 分类号 |
H01J37/32;H03H7/38 |
主分类号 |
H01J37/32 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A magnetron and a plasma waveguide through which a microwave oscillated from the magnetron moves, the plasma waveguide comprising:
a plurality of step parts formed at any one side on an inner side surface of the waveguide; and a block part of a predetermined height formed at any other side on the inner side surface of the waveguide, wherein the block part is formed at a side opposite to a boundary part between the plurality of step parts. |
| 地址 |
Gyeonggi-do KR |
