| 发明名称 |
INFORMATION ACQUIRING APPARATUS AND INFORMATION ACQUIRING METHOD OF ACQUIRING INFORMATION OF SAMPLE BY USING TERAHERTZ WAVE |
| 摘要 |
An information acquiring apparatus that acquires information of a sample includes an irradiation unit configured to irradiate an irradiation position of the sample with a terahertz wave through a transmission member being in contact with the sample; a detection unit configured to detect a terahertz wave reflected by the transmission member and a terahertz wave reflected by the sample; a waveform acquiring unit configured to acquire a time waveform of the terahertz wave reflected by the transmission member and a time waveform of the terahertz wave reflected by the sample, by using detection results of the detection unit; and an information acquiring unit configured to acquire the information of the sample by using the time waveform of the terahertz wave reflected by the transmission member, the time waveform of the terahertz wave reflected by the sample, and information relating to a thickness of the transmission member at the irradiation position. |
| 申请公布号 |
US2014291524(A1) |
申请公布日期 |
2014.10.02 |
| 申请号 |
US201414225038 |
申请日期 |
2014.03.25 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Kubota Oichi;Yamaguchi Sayuri |
| 分类号 |
G01N21/55 |
主分类号 |
G01N21/55 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An information acquiring apparatus that acquires information of a sample, comprising:
an irradiation unit configured to irradiate an irradiation position of the sample with a terahertz wave through a transmission member being in contact with the sample; a detection unit configured to detect a terahertz wave reflected by the transmission member and a terahertz wave reflected by the sample; a waveform acquiring unit configured to acquire a time waveform of the terahertz wave reflected by the transmission member and a time waveform of the terahertz wave reflected by the sample, by using detection results of the detection unit; and an information acquiring unit configured to acquire the information of the sample by using the time waveform of the terahertz wave reflected by the transmission member, the time waveform of the terahertz wave reflected by the sample, and information relating to a thickness of the transmission member at the irradiation position. |
| 地址 |
Tokyo JP |
