发明名称 ELEMENT MANUFACTURING METHOD AND ELEMENT MANUFACTURING APPARATUS
摘要 [Problem] To provide an element manufacturing method and an element manufacturing apparatus for efficiently manufacturing elements. [Solution] First, an intermediate product (50), which includes a substrate (41) and protrusions (44) that extend in the normal direction of the substrate (41), is formed. Next, the intermediate product (50) is covered using a first surface (21d) of a lid material (21c) on the side of the protrusions (44). Then, gas is injected in a sealed space (28) formed on a second surface (21e) side of the lid material (21c), which is on the opposite side of the first surface (21d), so as to increase the pressure in the sealed space (28), thus bringing the first surface (21d) of the lid material (21c) into close contact with the intermediate product (50).
申请公布号 WO2014157658(A1) 申请公布日期 2014.10.02
申请号 WO2014JP59265 申请日期 2014.03.28
申请人 DAI NIPPON PRINTING CO., LTD. 发明人 NIRENGI TAKAYOSHI;TAKEDA TOSHIHIKO;NAKAJIMA HIROYOSHI
分类号 H05B33/10;H01L51/05;H01L51/40;H01L51/50;H05B33/02;H05B33/12;H05B33/26 主分类号 H05B33/10
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