PASSAGE UNIT, LIQUID JET HEAD, LIQUID JET APPARATUS, AND MANUFACTURING METHOD OF PASSAGE UNIT

摘要

PROBLEM TO BE SOLVED: To provide a technology capable of inhibiting a liquid from seeping from a diaphragm.SOLUTION: A passage unit U0 includes: a deformable diaphragm 11; and a pressure chamber 21 in which the diaphragm 11 forming a part of a wall is deformed thereby applying a pressure to a liquid F. The diaphragm 11 includes: a ceramic base material 12; and a filler 14 which fills a clearance CL1 located at an internal space 12c of the base material 12 and inhibits the liquid F from passing therethrough. A liquid jet head 1 includes: the passage unit U0; and a nozzle 62 which communicates with the pressure chamber 21. A liquid jet apparatus 200 is equipped with the liquid jet head 1. The filler 14 may contain one or more kinds of substances selected from a photo-setting resin, a substance remaining when moisture in a solution F14 is absorbed by an absorbent F13, a lump generated from a solution F16 by a modifier F15, and a thermoset resin and may contain atoms having a coordination number of 6 or larger.