Methods and apparatuses for roll-on coating

摘要

Coating rollers accepting liquid media provide liquid chemicals to substrates for depositing a thin coating layer on the flat substrates, such as semiconductors or panels. The liquid media is cooled to a life-preserving temperature while shielded from the thermal energy heating the substrates to prevent degrading the liquid media. Physical barrier or temperature barrier can be established in vicinities of the rollers to further limit exposing the liquid media to high temperature.

主权项

1. A method comprising:
providing a liquid in a liquid container; heat a first portion of the liquid to generate a temperature difference with a second portion of the liquid; transferring a liquid from the first portion to at least one roller, wherein the at least one roller is configured to form a liquid coating on a substrate.