| 摘要 |
A workpiece transfer apparatus comprises a nozzle unit and an imaging unit wherein the nozzle unit includes a cylindrical body, a suction hole opening at one end of the tuber body and an end face member of a transparent body sealing the other end of the tuber body. The suction hole can make the imaging unit capable of taking images of first patterns for positioning on an upper surface (suctioned surface) of a workpiece, and the size and shape of the suction hole fits within an outline of the upper surface of the workpiece. The end face member of the transparent body both enable to maintain negative pressure of inside of the cylindrical body and to permit optical penetration for the imaging unit. The imaging unit takes the image of the first pattern for positioning of the workpiece while the imaging unit views a suctioned surface of the workpiece through the transparent body and the suction hole. |
