| 发明名称 |
SCANNING PROBE MICROSCOPE |
| 摘要 |
A scanning probe microscope is provided for scanning a sample surface with a probe formed on a cantilever and detecting an interaction acting between the probe and the sample surface to measure a physical property including a surface shape of the sample. The microscope includes an arrangement for detecting torsion of the cantilever and for correcting a profile error caused by deflection of the probe and torsion of the cantilever based on the amount of torsion which is detected. |
| 申请公布号 |
US2014298548(A1) |
申请公布日期 |
2014.10.02 |
| 申请号 |
US201414304362 |
申请日期 |
2014.06.13 |
| 申请人 |
Hitachi, Ltd. |
发明人 |
BABA Shuichi;WATANABE Masahiro;MORIMOTO Takafumi;EDAMURA Manabu;NAKATA Toshihiko;KEMBO Yukio;KURENUMA Toru;SEKINO Satoshi |
| 分类号 |
G01Q10/00 |
主分类号 |
G01Q10/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A scanning probe microscope for scanning a sample surface with a probe formed on a cantilever and detecting an interaction acting between the probe and the sample surface to measure a physical property including a surface shape of the sample, comprising means for detecting torsion of the cantilever and for correcting a profile error caused by deflection of the probe and torsion of the cantilever based on the amount of torsion which is detected. |
| 地址 |
Tokyo JP |
