Removable compartments for workpiece stocker

摘要

The present invention discloses apparatuses and method for configuring a compartmentable equipment to accommodate emergency responses. An exemplary equipment comprises a plurality of removable compartments for storing workpieces so that in emergency events, such as power failure or equipment failure, the workpieces can be removed from the equipment for continuing processing without disrupting the flow of the fabrication facility. The compartmentable equipment can comprise emergency access ports, including mating interface to a portable workpiece removal equipment to allow accessing the individual compartments without compromising the quality, defects and yield of the workpieces stored in the stocker.

主权项

1. A method for improving the operation of a workpiece stocker, the stocker comprising
a chamber for storing a plurality of workpieces, wherein the chamber is compartmentalized into a plurality of compartments, wherein the plurality of compartments are open during normal operation; a robotic mechanism to transfer the workpieces from the chamber to an IO station; and an emergency access port for accessing the workpieces in the event of a failure of the workpiece stocker, the method comprising assessing that the failure occurs; and sealing the plurality of compartments before accessing the stocker to prevent contamination, wherein the stocker is accessed through the emergency access port.