发明名称 LIGHT EXPOSURE DEVICE AND LIGHT EXPOSURE METHOD
摘要 <p>Provided is a light exposure technology capable of stably forming images across an entire light exposure surface of a substrate, using a simple configuration. The light exposure device which exposes a flexible, belt-shaped substrate (S) comprises: two holding sections (20) formed using a light-transparent member, having transparent sections having flat surfaces, and comprising a first holding section (20a) and a second holding section (20b) that are capable of holding the substrate by using each flat surface; a first movement unit (50) that moves the two holding sections (20) in the approaching direction and the receding direction; a first light exposure unit (30) fixed in position on the first holding section (20a) side; a second light exposure unit (40) arranged on the second holding section (20b) side; and a second movement unit (60) that relatively moves the two holding sections and the two light exposure units, in a substrate-held state. The light exposure device maintains a set distance between each flat surface of the two holding sections (20) and the two light exposure units, moves the first and second holding sections (20a, 20b), feeds the substrate in the longitudinal direction, and simultaneously exposes both surfaces of the substrate via the transparent sections of the two holding sections (20).</p>
申请公布号 WO2014157026(A1) 申请公布日期 2014.10.02
申请号 WO2014JP57968 申请日期 2014.03.24
申请人 SANEI GIKEN CO., LTD. 发明人 MIYAKE, KEN;TAKAGI, TOSHIHIRO
分类号 G03F7/20;H01L21/027;H01L21/677 主分类号 G03F7/20
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