| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing sheet capable of reducing occurrence of dicing debris, and reducing the possibility of occurrence of problems when a polyolefin-based film is irradiated with an electron beam in the process of manufacturing its component, i.e., a substrate film, and to provide the component of the dicing sheet, i.e., a substrate film, a method of manufacturing the dicing sheet, and a method of manufacturing a chip-like member.SOLUTION: In a substrate film 2 for dicing sheet including a polyolefin-based film irradiated with an electron beam, irradiation of an electron beam for the polyolefin-based film is performed to satisfy following conditions (a)-(c) entirely. (a) Cumulative irradiation of electron beam is 115 kGy or more, (b) Cumulative irradiation time of electron beam is 8 sec or less, and (c) Irradiation amount of electron beam per irradiation is 135 kGy or less. |
