PIEZOELECTRIC THIN FILM MULTILAYER SUBSTRATE, PIEZOELECTRIC THIN FILM ELEMENT AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric thin film element having a piezoelectric character equal to or higher than a conventional one, a piezoelectric thin film multilayer substrate capable of making the piezoelectric thin film element and a method of manufacturing the same.SOLUTION: A method of manufacturing a piezoelectric thin film multilayer substrate comprises: a step of forming a metal layer 3 on a heat resistant first substrate 1; a step of forming a KNN thin film layer 4 on the metal layer 3; a step of forming a first bonding/electrode layer 5 on the piezoelectric thin film layer 4; a step of forming a second bonding/electrode layer 5' on a flexible second substrate 6; a step of obtaining a composite substrate 8 in which the first substrate 1 and the second substrate 6 are integrated with each other while sandwiching the piezoelectric thin film layer 4 between them by bonding the first bonding/electrode layer 5 and the second bonding/electrode layer 5'; and a step of removing the first substrate 1 while leaving the piezoelectric thin film layer 4 on the side of the second substrate 6 by performing wet etching on the composite substrate 8.