| 发明名称 |
ELECTRONIC DEVICE, METHOD FOR PRODUCING THE SAME, AND OSCILLATOR |
| 摘要 |
An electronic device according to an aspect of the invention include: a substrate; an underlayer having an opening and being formed on the substrate; a functional element provided on the underlayer; and a surrounding wall forming a cavity that accommodates the functional element, at least a part of the surrounding wall being disposed in the opening. |
| 申请公布号 |
US2014292430(A1) |
申请公布日期 |
2014.10.02 |
| 申请号 |
US201414219694 |
申请日期 |
2014.03.19 |
| 申请人 |
SEIKO EPSON CORPORATION |
发明人 |
YOSHIZAWA Takahiko |
| 分类号 |
H01L23/04;H01L23/00;H03B5/30;H01L21/768 |
主分类号 |
H01L23/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An electronic device comprising:
a substrate; an underlayer having an opening and being formed on the substrate; a functional element provided on the underlayer; and a surrounding wall forming a cavity that accommodates the functional element, at least a part of the surrounding wall being disposed in the opening. |
| 地址 |
Tokyo JP |
