| 发明名称 |
Source Bushing Shielding |
| 摘要 |
The source bushing assembly has a source bushing having an internal vacuum side and an external atmosphere side, a first shield of annular shape disposed at one end of the source bushing in spaced concentric relation to reduce formation of an electrically conductive coating on the source bushing, a second shield of annular shape disposed at an opposite end of the source bushing in spaced concentric relation to prevent arcing on the source bushing and an internally disposed concentric X-ray shield. |
| 申请公布号 |
US2014291554(A1) |
申请公布日期 |
2014.10.02 |
| 申请号 |
US201313850557 |
申请日期 |
2013.03.26 |
| 申请人 |
Jerez Manuel A.;Borges Carlos F.M.;Lisa Charles W.;Centeno Alejandro M. |
发明人 |
Jerez Manuel A.;Borges Carlos F.M.;Lisa Charles W.;Centeno Alejandro M. |
| 分类号 |
G21K1/00;H01J37/317 |
主分类号 |
G21K1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A source bushing assembly for an ion source comprising
a source bushing of annular shape having an internal vacuum side and an external atmosphere side; a source flange secured to said source bushing at one end thereof; a first shield of annular shape mounted on said source flange and disposed in spaced concentric relation to said internal vacuum side of said source bushing to slow formation of an electrically conductive coating on said source bushing; a source liner secured to said source bushing at an opposite end from said source flange; and a second shield of annular shape mounted on said source liner and disposed in spaced concentric relation to said internal vacuum side of said source bushing to prevent coating of said source bushing. |
| 地址 |
Roosevelt NY US |
