| 摘要 |
An angular velocity sensor provided with a drive circuit for generating a drive signal, an oscillating weight, an oscillation unit for causing the oscillating weight to oscillate along a first and second axis according to the drive signal, an output unit for outputting a signal that is based on the Coriolis force generated in accordance with an angular velocity and the oscillation of the oscillating weight, a detection circuit for detecting the angular velocity from the signal that is based on the Coriolis force, and a first oscillation damping unit that electrically consumes the kinetic energy of the oscillating weight. |
